Nano Fabrication and Process Capability

E6NanoFab offers a wide range of micro- & nano-fabrication processes to enable the creation of nanoscale structures and devices with top-down and bottom-up approaches. The equipment are capable to process coupon size wafer to full 200 mm wafer which make it easy to scale up the prototype to production level.

The facility is designed to provide maximum flexibility with capabilities to process a variety of materials such as CMOS compatible materials, magnetic materials, III-V & III-N materials, 2D materials and flexible materials.