L2 Wet Lab

The level 2 wet lab is a critical zone that involves the use of acid, solvent and high temperature equipment.

Location
E6-02-07

Contact
Musni HUSSAIN
Email: elemh@nus.edu.sg 
Tel:6601 7042

Acid Wet Bench            Solvent Wet Bench

Cleanroom Wet Process; wet bench for acid use           

Baking Oven                   DI Water System

wafer oven baking              

E-Beam Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo

Substrate size:
Irregular to standard 8”dia wafer.

Metals:
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.

Crucibles:
Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.

Availability:
To be advised.