L2 Dry Lab

The level 2 dry lab is equipped with 3 evaporation systems for metalisation.

Location
E6-02-07

Contact
Musni HUSSAIN
Email: elemh@nus.edu.sg
Tel:6601 7042

Edward E-beam Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo

Substrate size:
Irregular to standard 8”dia wafer

Metals:
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.

Crucibles:
Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.

The Application

The heating is carried out by passing a large current through a filament container (tungsten boat or material coated tungsten rod), which has a finite electrical resistance.

Model: JEOL JEE420T

Overview

The JEE-420T is used for thin film coating and is
a simple tool to operate.

It is primarily used for preparation of various samples
that are suitable for observation using SEM
(Scanning Electron Microscopes) and TEM
(Transmission Electron Microscopes).

However, it can also be used for various other
applications not limited to preparing bond pads
for wire bonding.

 

 

Metals:
Aluminum, Nickel, Titanium, Gold, Gold-Germanium.

The Application

The heating is carried out by passing a large current through a filament container (tungsten boat or material coated tungsten rod), which has a finite electrical resistance.